JPS6390837U - - Google Patents

Info

Publication number
JPS6390837U
JPS6390837U JP18653886U JP18653886U JPS6390837U JP S6390837 U JPS6390837 U JP S6390837U JP 18653886 U JP18653886 U JP 18653886U JP 18653886 U JP18653886 U JP 18653886U JP S6390837 U JPS6390837 U JP S6390837U
Authority
JP
Japan
Prior art keywords
ring
sleeve fixing
shaped sleeve
fixing members
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18653886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341467Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18653886U priority Critical patent/JPH0341467Y2/ja
Publication of JPS6390837U publication Critical patent/JPS6390837U/ja
Application granted granted Critical
Publication of JPH0341467Y2 publication Critical patent/JPH0341467Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18653886U 1986-12-03 1986-12-03 Expired JPH0341467Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18653886U JPH0341467Y2 (OSRAM) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18653886U JPH0341467Y2 (OSRAM) 1986-12-03 1986-12-03

Publications (2)

Publication Number Publication Date
JPS6390837U true JPS6390837U (OSRAM) 1988-06-13
JPH0341467Y2 JPH0341467Y2 (OSRAM) 1991-08-30

Family

ID=31136181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18653886U Expired JPH0341467Y2 (OSRAM) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPH0341467Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178327U (OSRAM) * 1987-05-11 1988-11-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178327U (OSRAM) * 1987-05-11 1988-11-18

Also Published As

Publication number Publication date
JPH0341467Y2 (OSRAM) 1991-08-30

Similar Documents

Publication Publication Date Title
TWI451093B (zh) 多重偏移晶粒頭
US4523144A (en) Complex probe card for testing a semiconductor wafer
US7482822B2 (en) Apparatus and method for limiting over travel in a probe card assembly
US20080030214A1 (en) Probe head assembly for use in testing multiple wafer die
JPS6011170A (ja) 座屈はりテスト・プロ−ブ組立体
JPS6390837U (OSRAM)
US6196866B1 (en) Vertical probe housing
JP2834076B2 (ja) ウェハプローバ
JPH0267644U (OSRAM)
USH663H (en) High density probe head for chip testing
JPH083516B2 (ja) 半導体装置用テストヘッドおよびテスト方法
JPH073833B2 (ja) プローブ装置
JP2555716Y2 (ja) テストヘッド
JPH058681Y2 (OSRAM)
JPS6449310U (OSRAM)
JPS6259846U (OSRAM)
JPH0316905U (OSRAM)
JPS60118765U (ja) プロ−ブカ−ド
JPS6329538A (ja) プロ−ブ装置
JPH0513559A (ja) ウエハ挿入用アダプタ
JPH0171676U (OSRAM)
JPS6336042U (OSRAM)
JPH04330748A (ja) プローブカードの組立装置
JPS62153647U (OSRAM)
JPS6390839U (OSRAM)