JPS6389975U - - Google Patents

Info

Publication number
JPS6389975U
JPS6389975U JP18625386U JP18625386U JPS6389975U JP S6389975 U JPS6389975 U JP S6389975U JP 18625386 U JP18625386 U JP 18625386U JP 18625386 U JP18625386 U JP 18625386U JP S6389975 U JPS6389975 U JP S6389975U
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
phase epitaxial
reaction tube
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18625386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18625386U priority Critical patent/JPS6389975U/ja
Publication of JPS6389975U publication Critical patent/JPS6389975U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の液相エピタキシヤ
ル成長装置の断面図、第２図は従来の液相エピタ
キシヤル成長装置の例を示す断面図である。 １：加熱炉、２：反応管、３：操作棒、４：ス
ライドボート、５：予熱炉。

Claims (1)

    【実用新案登録請求の範囲】
  1. 液相エピタキシヤル成長を行なうように構成し
    たスライドボートを内設した反応管を加熱炉内に
    設置し、前記反応管内に導入したガスを加熱して
    エピタキシヤル成長を行なう液相エピタキシヤル
    成長装置において、前記ガスを、前以て前記スラ
    イドボート付近のガス雰囲気と同一温度まで加熱
    する予熱炉を備えていることを特徴とする液相エ
    ピタキシヤル成長装置。
JP18625386U 1986-12-03 1986-12-03 Pending JPS6389975U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18625386U JPS6389975U (ja) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18625386U JPS6389975U (ja) 1986-12-03 1986-12-03

Publications (1)

Publication Number Publication Date
JPS6389975U true JPS6389975U (ja) 1988-06-10

Family

ID=31135641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18625386U Pending JPS6389975U (ja) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPS6389975U (ja)

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