JPS6389964U - - Google Patents
Info
- Publication number
- JPS6389964U JPS6389964U JP18184186U JP18184186U JPS6389964U JP S6389964 U JPS6389964 U JP S6389964U JP 18184186 U JP18184186 U JP 18184186U JP 18184186 U JP18184186 U JP 18184186U JP S6389964 U JPS6389964 U JP S6389964U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- ionization section
- lid
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184186U JPH0516214Y2 (zh) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184186U JPH0516214Y2 (zh) | 1986-11-28 | 1986-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389964U true JPS6389964U (zh) | 1988-06-10 |
| JPH0516214Y2 JPH0516214Y2 (zh) | 1993-04-28 |
Family
ID=31127084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18184186U Expired - Lifetime JPH0516214Y2 (zh) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516214Y2 (zh) |
-
1986
- 1986-11-28 JP JP18184186U patent/JPH0516214Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516214Y2 (zh) | 1993-04-28 |
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