JPS638610B2 - - Google Patents
Info
- Publication number
- JPS638610B2 JPS638610B2 JP57085934A JP8593482A JPS638610B2 JP S638610 B2 JPS638610 B2 JP S638610B2 JP 57085934 A JP57085934 A JP 57085934A JP 8593482 A JP8593482 A JP 8593482A JP S638610 B2 JPS638610 B2 JP S638610B2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- aperture
- deflectors
- deflector
- charged beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000010894 electron beam technology Methods 0.000 description 22
- 238000010586 diagram Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 238000007493 shaping process Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8593482A JPS58202529A (ja) | 1982-05-21 | 1982-05-21 | 荷電ビ−ム光学鏡筒 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8593482A JPS58202529A (ja) | 1982-05-21 | 1982-05-21 | 荷電ビ−ム光学鏡筒 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58202529A JPS58202529A (ja) | 1983-11-25 |
JPS638610B2 true JPS638610B2 (ro) | 1988-02-23 |
Family
ID=13872582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8593482A Granted JPS58202529A (ja) | 1982-05-21 | 1982-05-21 | 荷電ビ−ム光学鏡筒 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58202529A (ro) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093571A (ro) * | 1973-12-19 | 1975-07-25 | ||
JPS522176A (en) * | 1975-06-13 | 1977-01-08 | Ibm | Method of forming integrated circuit pattern |
JPS545664A (en) * | 1977-06-15 | 1979-01-17 | Cho Lsi Gijutsu Kenkyu Kumiai | Device for exposing electron beam |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52131963U (ro) * | 1976-03-31 | 1977-10-06 |
-
1982
- 1982-05-21 JP JP8593482A patent/JPS58202529A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093571A (ro) * | 1973-12-19 | 1975-07-25 | ||
JPS522176A (en) * | 1975-06-13 | 1977-01-08 | Ibm | Method of forming integrated circuit pattern |
JPS545664A (en) * | 1977-06-15 | 1979-01-17 | Cho Lsi Gijutsu Kenkyu Kumiai | Device for exposing electron beam |
Also Published As
Publication number | Publication date |
---|---|
JPS58202529A (ja) | 1983-11-25 |
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