JPS6384931U - - Google Patents
Info
- Publication number
- JPS6384931U JPS6384931U JP17990286U JP17990286U JPS6384931U JP S6384931 U JPS6384931 U JP S6384931U JP 17990286 U JP17990286 U JP 17990286U JP 17990286 U JP17990286 U JP 17990286U JP S6384931 U JPS6384931 U JP S6384931U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- semiconductor wafer
- vapor phase
- phase growth
- support stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17990286U JPS6384931U (sv) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17990286U JPS6384931U (sv) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384931U true JPS6384931U (sv) | 1988-06-03 |
Family
ID=31123374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17990286U Pending JPS6384931U (sv) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384931U (sv) |
-
1986
- 1986-11-21 JP JP17990286U patent/JPS6384931U/ja active Pending
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