JPS6339930U - - Google Patents
Info
- Publication number
- JPS6339930U JPS6339930U JP13297386U JP13297386U JPS6339930U JP S6339930 U JPS6339930 U JP S6339930U JP 13297386 U JP13297386 U JP 13297386U JP 13297386 U JP13297386 U JP 13297386U JP S6339930 U JPS6339930 U JP S6339930U
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- heating means
- heat treatment
- infrared heating
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13297386U JPS6339930U (sv) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13297386U JPS6339930U (sv) | 1986-08-29 | 1986-08-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6339930U true JPS6339930U (sv) | 1988-03-15 |
Family
ID=31032856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13297386U Pending JPS6339930U (sv) | 1986-08-29 | 1986-08-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6339930U (sv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0268479A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
JP2008010883A (ja) * | 2007-08-10 | 2008-01-17 | Matsushita Electric Ind Co Ltd | 光照射熱処理方法および光照射熱処理装置 |
-
1986
- 1986-08-29 JP JP13297386U patent/JPS6339930U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0268479A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
JP2008010883A (ja) * | 2007-08-10 | 2008-01-17 | Matsushita Electric Ind Co Ltd | 光照射熱処理方法および光照射熱処理装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6339930U (sv) | ||
JPS6322733U (sv) | ||
JPS6416633U (sv) | ||
JPH01121927U (sv) | ||
JPS61142445U (sv) | ||
JPH01162234U (sv) | ||
JPS6237927U (sv) | ||
JPS61195044U (sv) | ||
JPS631325U (sv) | ||
JPS63127121U (sv) | ||
JPS62145328U (sv) | ||
SU879231A1 (ru) | Устройство дл охлаждени обжигаемого строительного материала | |
JPS62149350U (sv) | ||
JPS63162871U (sv) | ||
JPS63124739U (sv) | ||
JPH0171436U (sv) | ||
JPS61158947U (sv) | ||
JPS6354294U (sv) | ||
JPS6342152U (sv) | ||
JPS6382932U (sv) | ||
JPH0187531U (sv) | ||
JPS63149523U (sv) | ||
JPH0192128U (sv) | ||
JPS6188233U (sv) | ||
JPH01153366U (sv) |