JPS6188233U - - Google Patents
Info
- Publication number
- JPS6188233U JPS6188233U JP17370184U JP17370184U JPS6188233U JP S6188233 U JPS6188233 U JP S6188233U JP 17370184 U JP17370184 U JP 17370184U JP 17370184 U JP17370184 U JP 17370184U JP S6188233 U JPS6188233 U JP S6188233U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- semiconductor manufacturing
- furnace core
- housed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17370184U JPS6188233U (sv) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17370184U JPS6188233U (sv) | 1984-11-15 | 1984-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6188233U true JPS6188233U (sv) | 1986-06-09 |
Family
ID=30731342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17370184U Pending JPS6188233U (sv) | 1984-11-15 | 1984-11-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6188233U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01170019A (ja) * | 1987-12-25 | 1989-07-05 | Mitsubishi Metal Corp | 不純物拡散方法 |
-
1984
- 1984-11-15 JP JP17370184U patent/JPS6188233U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01170019A (ja) * | 1987-12-25 | 1989-07-05 | Mitsubishi Metal Corp | 不純物拡散方法 |