JPH0339833U - - Google Patents
Info
- Publication number
- JPH0339833U JPH0339833U JP10086989U JP10086989U JPH0339833U JP H0339833 U JPH0339833 U JP H0339833U JP 10086989 U JP10086989 U JP 10086989U JP 10086989 U JP10086989 U JP 10086989U JP H0339833 U JPH0339833 U JP H0339833U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- divided
- heats
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10086989U JPH0339833U (sv) | 1989-08-28 | 1989-08-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10086989U JPH0339833U (sv) | 1989-08-28 | 1989-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0339833U true JPH0339833U (sv) | 1991-04-17 |
Family
ID=31649852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10086989U Pending JPH0339833U (sv) | 1989-08-28 | 1989-08-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0339833U (sv) |
-
1989
- 1989-08-28 JP JP10086989U patent/JPH0339833U/ja active Pending