JPH01163329U - - Google Patents
Info
- Publication number
- JPH01163329U JPH01163329U JP6098188U JP6098188U JPH01163329U JP H01163329 U JPH01163329 U JP H01163329U JP 6098188 U JP6098188 U JP 6098188U JP 6098188 U JP6098188 U JP 6098188U JP H01163329 U JPH01163329 U JP H01163329U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- reaction
- reaction vessel
- gas
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6098188U JPH01163329U (sv) | 1988-05-09 | 1988-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6098188U JPH01163329U (sv) | 1988-05-09 | 1988-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01163329U true JPH01163329U (sv) | 1989-11-14 |
Family
ID=31286672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6098188U Pending JPH01163329U (sv) | 1988-05-09 | 1988-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01163329U (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112721A (en) * | 1980-02-12 | 1981-09-05 | Toshiba Corp | Vapor phase epitaxial growing apparatus |
-
1988
- 1988-05-09 JP JP6098188U patent/JPH01163329U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112721A (en) * | 1980-02-12 | 1981-09-05 | Toshiba Corp | Vapor phase epitaxial growing apparatus |