JPS63154664U - - Google Patents
Info
- Publication number
- JPS63154664U JPS63154664U JP4480487U JP4480487U JPS63154664U JP S63154664 U JPS63154664 U JP S63154664U JP 4480487 U JP4480487 U JP 4480487U JP 4480487 U JP4480487 U JP 4480487U JP S63154664 U JPS63154664 U JP S63154664U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- wall
- base material
- heat source
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4480487U JPS63154664U (sv) | 1987-03-26 | 1987-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4480487U JPS63154664U (sv) | 1987-03-26 | 1987-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63154664U true JPS63154664U (sv) | 1988-10-11 |
Family
ID=30862961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4480487U Pending JPS63154664U (sv) | 1987-03-26 | 1987-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63154664U (sv) |
-
1987
- 1987-03-26 JP JP4480487U patent/JPS63154664U/ja active Pending