JPS62198276U - - Google Patents
Info
- Publication number
- JPS62198276U JPS62198276U JP8537586U JP8537586U JPS62198276U JP S62198276 U JPS62198276 U JP S62198276U JP 8537586 U JP8537586 U JP 8537586U JP 8537586 U JP8537586 U JP 8537586U JP S62198276 U JPS62198276 U JP S62198276U
- Authority
- JP
- Japan
- Prior art keywords
- large number
- slit
- reversed
- flow direction
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8537586U JPS62198276U (sv) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8537586U JPS62198276U (sv) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62198276U true JPS62198276U (sv) | 1987-12-17 |
Family
ID=30940720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8537586U Pending JPS62198276U (sv) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62198276U (sv) |
-
1986
- 1986-06-06 JP JP8537586U patent/JPS62198276U/ja active Pending
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