JPS62193723U - - Google Patents
Info
- Publication number
- JPS62193723U JPS62193723U JP8196786U JP8196786U JPS62193723U JP S62193723 U JPS62193723 U JP S62193723U JP 8196786 U JP8196786 U JP 8196786U JP 8196786 U JP8196786 U JP 8196786U JP S62193723 U JPS62193723 U JP S62193723U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- steam chamber
- processing apparatus
- heating section
- wafer processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 150000002894 organic compounds Chemical class 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 230000006837 decompression Effects 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8196786U JPS62193723U (sv) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8196786U JPS62193723U (sv) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193723U true JPS62193723U (sv) | 1987-12-09 |
Family
ID=30934192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8196786U Pending JPS62193723U (sv) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193723U (sv) |
-
1986
- 1986-05-30 JP JP8196786U patent/JPS62193723U/ja active Pending