JPH01179431U - - Google Patents
Info
- Publication number
- JPH01179431U JPH01179431U JP7591488U JP7591488U JPH01179431U JP H01179431 U JPH01179431 U JP H01179431U JP 7591488 U JP7591488 U JP 7591488U JP 7591488 U JP7591488 U JP 7591488U JP H01179431 U JPH01179431 U JP H01179431U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- growth apparatus
- vapor phase
- head
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 8
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7591488U JPH01179431U (sv) | 1988-06-07 | 1988-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7591488U JPH01179431U (sv) | 1988-06-07 | 1988-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179431U true JPH01179431U (sv) | 1989-12-22 |
Family
ID=31300963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7591488U Pending JPH01179431U (sv) | 1988-06-07 | 1988-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179431U (sv) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008066413A (ja) * | 2006-09-05 | 2008-03-21 | Tokyo Electron Ltd | シャワーヘッド構造及びこれを用いた処理装置 |
| JP2008270839A (ja) * | 2008-07-24 | 2008-11-06 | Tadahiro Omi | プラズマ処理装置 |
| JP2011086887A (ja) * | 2009-10-19 | 2011-04-28 | Shin Etsu Handotai Co Ltd | エピタキシャル成長装置 |
-
1988
- 1988-06-07 JP JP7591488U patent/JPH01179431U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008066413A (ja) * | 2006-09-05 | 2008-03-21 | Tokyo Electron Ltd | シャワーヘッド構造及びこれを用いた処理装置 |
| JP2008270839A (ja) * | 2008-07-24 | 2008-11-06 | Tadahiro Omi | プラズマ処理装置 |
| JP4689706B2 (ja) * | 2008-07-24 | 2011-05-25 | 忠弘 大見 | プラズマ処理装置 |
| JP2011086887A (ja) * | 2009-10-19 | 2011-04-28 | Shin Etsu Handotai Co Ltd | エピタキシャル成長装置 |