JPS6384867U - - Google Patents

Info

Publication number
JPS6384867U
JPS6384867U JP18060886U JP18060886U JPS6384867U JP S6384867 U JPS6384867 U JP S6384867U JP 18060886 U JP18060886 U JP 18060886U JP 18060886 U JP18060886 U JP 18060886U JP S6384867 U JPS6384867 U JP S6384867U
Authority
JP
Japan
Prior art keywords
ion implantation
ion beam
implantation device
ion
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18060886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18060886U priority Critical patent/JPS6384867U/ja
Publication of JPS6384867U publication Critical patent/JPS6384867U/ja
Pending legal-status Critical Current

Links

JP18060886U 1986-11-24 1986-11-24 Pending JPS6384867U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18060886U JPS6384867U (enrdf_load_stackoverflow) 1986-11-24 1986-11-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18060886U JPS6384867U (enrdf_load_stackoverflow) 1986-11-24 1986-11-24

Publications (1)

Publication Number Publication Date
JPS6384867U true JPS6384867U (enrdf_load_stackoverflow) 1988-06-03

Family

ID=31124718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18060886U Pending JPS6384867U (enrdf_load_stackoverflow) 1986-11-24 1986-11-24

Country Status (1)

Country Link
JP (1) JPS6384867U (enrdf_load_stackoverflow)

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