JPH0163061U - - Google Patents

Info

Publication number
JPH0163061U
JPH0163061U JP1987157780U JP15778087U JPH0163061U JP H0163061 U JPH0163061 U JP H0163061U JP 1987157780 U JP1987157780 U JP 1987157780U JP 15778087 U JP15778087 U JP 15778087U JP H0163061 U JPH0163061 U JP H0163061U
Authority
JP
Japan
Prior art keywords
scanning electrode
slit
scanning
scans
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987157780U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987157780U priority Critical patent/JPH0163061U/ja
Publication of JPH0163061U publication Critical patent/JPH0163061U/ja
Pending legal-status Critical Current

Links

JP1987157780U 1987-10-15 1987-10-15 Pending JPH0163061U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987157780U JPH0163061U (enrdf_load_stackoverflow) 1987-10-15 1987-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987157780U JPH0163061U (enrdf_load_stackoverflow) 1987-10-15 1987-10-15

Publications (1)

Publication Number Publication Date
JPH0163061U true JPH0163061U (enrdf_load_stackoverflow) 1989-04-24

Family

ID=31437520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987157780U Pending JPH0163061U (enrdf_load_stackoverflow) 1987-10-15 1987-10-15

Country Status (1)

Country Link
JP (1) JPH0163061U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249774A (en) * 1975-10-20 1977-04-21 Hitachi Ltd Ion implanting device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249774A (en) * 1975-10-20 1977-04-21 Hitachi Ltd Ion implanting device

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