JPH038857U - - Google Patents

Info

Publication number
JPH038857U
JPH038857U JP6811989U JP6811989U JPH038857U JP H038857 U JPH038857 U JP H038857U JP 6811989 U JP6811989 U JP 6811989U JP 6811989 U JP6811989 U JP 6811989U JP H038857 U JPH038857 U JP H038857U
Authority
JP
Japan
Prior art keywords
electrode
electrode support
ion implantation
electrodes
multipole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6811989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6811989U priority Critical patent/JPH038857U/ja
Publication of JPH038857U publication Critical patent/JPH038857U/ja
Pending legal-status Critical Current

Links

JP6811989U 1989-06-13 1989-06-13 Pending JPH038857U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6811989U JPH038857U (enrdf_load_stackoverflow) 1989-06-13 1989-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6811989U JPH038857U (enrdf_load_stackoverflow) 1989-06-13 1989-06-13

Publications (1)

Publication Number Publication Date
JPH038857U true JPH038857U (enrdf_load_stackoverflow) 1991-01-28

Family

ID=31602284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6811989U Pending JPH038857U (enrdf_load_stackoverflow) 1989-06-13 1989-06-13

Country Status (1)

Country Link
JP (1) JPH038857U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223054A (ja) * 1999-02-02 2000-08-11 Advantest Corp 電子ビーム照射装置の静電偏向器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223054A (ja) * 1999-02-02 2000-08-11 Advantest Corp 電子ビーム照射装置の静電偏向器

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