JPS6384867U - - Google Patents
Info
- Publication number
- JPS6384867U JPS6384867U JP18060886U JP18060886U JPS6384867U JP S6384867 U JPS6384867 U JP S6384867U JP 18060886 U JP18060886 U JP 18060886U JP 18060886 U JP18060886 U JP 18060886U JP S6384867 U JPS6384867 U JP S6384867U
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- ion beam
- implantation device
- ion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 230000005465 channeling Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18060886U JPS6384867U (cs) | 1986-11-24 | 1986-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18060886U JPS6384867U (cs) | 1986-11-24 | 1986-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384867U true JPS6384867U (cs) | 1988-06-03 |
Family
ID=31124718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18060886U Pending JPS6384867U (cs) | 1986-11-24 | 1986-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384867U (cs) |
-
1986
- 1986-11-24 JP JP18060886U patent/JPS6384867U/ja active Pending
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