JPH0163061U - - Google Patents
Info
- Publication number
- JPH0163061U JPH0163061U JP1987157780U JP15778087U JPH0163061U JP H0163061 U JPH0163061 U JP H0163061U JP 1987157780 U JP1987157780 U JP 1987157780U JP 15778087 U JP15778087 U JP 15778087U JP H0163061 U JPH0163061 U JP H0163061U
- Authority
- JP
- Japan
- Prior art keywords
- scanning electrode
- slit
- scanning
- scans
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157780U JPH0163061U (cs) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157780U JPH0163061U (cs) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163061U true JPH0163061U (cs) | 1989-04-24 |
Family
ID=31437520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157780U Pending JPH0163061U (cs) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163061U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249774A (en) * | 1975-10-20 | 1977-04-21 | Hitachi Ltd | Ion implanting device |
-
1987
- 1987-10-15 JP JP1987157780U patent/JPH0163061U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249774A (en) * | 1975-10-20 | 1977-04-21 | Hitachi Ltd | Ion implanting device |