JPH038857U - - Google Patents
Info
- Publication number
- JPH038857U JPH038857U JP6811989U JP6811989U JPH038857U JP H038857 U JPH038857 U JP H038857U JP 6811989 U JP6811989 U JP 6811989U JP 6811989 U JP6811989 U JP 6811989U JP H038857 U JPH038857 U JP H038857U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode support
- ion implantation
- electrodes
- multipole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005405 multipole Effects 0.000 claims description 7
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811989U JPH038857U (cs) | 1989-06-13 | 1989-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811989U JPH038857U (cs) | 1989-06-13 | 1989-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038857U true JPH038857U (cs) | 1991-01-28 |
Family
ID=31602284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6811989U Pending JPH038857U (cs) | 1989-06-13 | 1989-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038857U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223054A (ja) * | 1999-02-02 | 2000-08-11 | Advantest Corp | 電子ビーム照射装置の静電偏向器 |
-
1989
- 1989-06-13 JP JP6811989U patent/JPH038857U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223054A (ja) * | 1999-02-02 | 2000-08-11 | Advantest Corp | 電子ビーム照射装置の静電偏向器 |
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