JPH0368348U - - Google Patents
Info
- Publication number
- JPH0368348U JPH0368348U JP12964089U JP12964089U JPH0368348U JP H0368348 U JPH0368348 U JP H0368348U JP 12964089 U JP12964089 U JP 12964089U JP 12964089 U JP12964089 U JP 12964089U JP H0368348 U JPH0368348 U JP H0368348U
- Authority
- JP
- Japan
- Prior art keywords
- liner
- ion implantation
- ion beam
- implanted
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12964089U JPH0368348U (cs) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12964089U JPH0368348U (cs) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368348U true JPH0368348U (cs) | 1991-07-04 |
Family
ID=31677256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12964089U Pending JPH0368348U (cs) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368348U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060549A (ja) * | 2006-07-18 | 2008-03-13 | Applied Materials Inc | イオン打ち込み装置用ビームストップ |
-
1989
- 1989-11-06 JP JP12964089U patent/JPH0368348U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060549A (ja) * | 2006-07-18 | 2008-03-13 | Applied Materials Inc | イオン打ち込み装置用ビームストップ |