JPS6383758U - - Google Patents
Info
- Publication number
- JPS6383758U JPS6383758U JP17821286U JP17821286U JPS6383758U JP S6383758 U JPS6383758 U JP S6383758U JP 17821286 U JP17821286 U JP 17821286U JP 17821286 U JP17821286 U JP 17821286U JP S6383758 U JPS6383758 U JP S6383758U
- Authority
- JP
- Japan
- Prior art keywords
- exposure time
- observation
- blocking
- sample
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821286U JPS6383758U (enExample) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821286U JPS6383758U (enExample) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383758U true JPS6383758U (enExample) | 1988-06-01 |
Family
ID=31120137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17821286U Pending JPS6383758U (enExample) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383758U (enExample) |
-
1986
- 1986-11-21 JP JP17821286U patent/JPS6383758U/ja active Pending