JPS637656B2 - - Google Patents

Info

Publication number
JPS637656B2
JPS637656B2 JP56175178A JP17517881A JPS637656B2 JP S637656 B2 JPS637656 B2 JP S637656B2 JP 56175178 A JP56175178 A JP 56175178A JP 17517881 A JP17517881 A JP 17517881A JP S637656 B2 JPS637656 B2 JP S637656B2
Authority
JP
Japan
Prior art keywords
grid
energy
reflective surface
particles
pass filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56175178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5878360A (ja
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP56175178A priority Critical patent/JPS5878360A/ja
Publication of JPS5878360A publication Critical patent/JPS5878360A/ja
Publication of JPS637656B2 publication Critical patent/JPS637656B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP56175178A 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置 Granted JPS5878360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56175178A JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56175178A JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS5878360A JPS5878360A (ja) 1983-05-11
JPS637656B2 true JPS637656B2 (zh) 1988-02-17

Family

ID=15991627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56175178A Granted JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS5878360A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962850A (en) * 1998-03-04 1999-10-05 Southwest Research Institute Large aperture particle detector with integrated antenna

Also Published As

Publication number Publication date
JPS5878360A (ja) 1983-05-11

Similar Documents

Publication Publication Date Title
JP4482179B2 (ja) 粒子ビーム装置
JP4523558B2 (ja) 分析システムおよび荷電粒子ビームデバイス
JPH0727556Y2 (ja) 荷電粒子エネルギ分析装置
JP3840558B2 (ja) 同時検出同位体比質量分析計
KR100443761B1 (ko) 하전 입자 장치
JP3266286B2 (ja) 荷電粒子エネルギー分析器
JP2021027038A (ja) 分光およびイメージングシステム
JP2001035434A (ja) エネルギ分解及び角度分解電子分光用の結像装置、その方法及び分光器
US4849629A (en) Charged particle analyzer
US5061856A (en) Corpuscular beam device
JPH0510897A (ja) Ｘ線光電子分光イメージング装置
JPS637656B2 (zh)
EP0346446A1 (en) Secondary ion mass spectrometer
KR20000034962A (ko) 하전입자의 이중-모드 검출 장치 및 방법
JPS5878361A (ja) 荷電粒子エネルギ−分析装置
US5107111A (en) Spherical electrode type charged particle analyzer
EP0295653B1 (en) High luminosity spherical analyzer for charged particles
JPH0114666B2 (zh)
US4320295A (en) Panoramic ion detector
JPH0269692A (ja) 荷電粒子ビームのエネルギーの球状ミラー分析器
JPH0627058A (ja) 電子分光方法とこれを用いた電子分光装置
JPS62226554A (ja) 荷電粒子エネルギ−アナライザ
EP0120106B1 (en) Charged particle energy analyzer
JPS5820103B2 (ja) 質量分析装置
JPS60172156A (ja) エネルギ−分析装置