JPS6375936U - - Google Patents
Info
- Publication number
- JPS6375936U JPS6375936U JP16907686U JP16907686U JPS6375936U JP S6375936 U JPS6375936 U JP S6375936U JP 16907686 U JP16907686 U JP 16907686U JP 16907686 U JP16907686 U JP 16907686U JP S6375936 U JPS6375936 U JP S6375936U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma chamber
- ion source
- main insulator
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (fr) | 1986-11-05 | 1986-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (fr) | 1986-11-05 | 1986-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375936U true JPS6375936U (fr) | 1988-05-20 |
Family
ID=31102552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16907686U Pending JPS6375936U (fr) | 1986-11-05 | 1986-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375936U (fr) |
-
1986
- 1986-11-05 JP JP16907686U patent/JPS6375936U/ja active Pending
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