JPS62193661U - - Google Patents
Info
- Publication number
- JPS62193661U JPS62193661U JP8097286U JP8097286U JPS62193661U JP S62193661 U JPS62193661 U JP S62193661U JP 8097286 U JP8097286 U JP 8097286U JP 8097286 U JP8097286 U JP 8097286U JP S62193661 U JPS62193661 U JP S62193661U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- ion beam
- ion source
- ion
- insulating spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097286U JPS62193661U (fr) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097286U JPS62193661U (fr) | 1986-05-30 | 1986-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62193661U true JPS62193661U (fr) | 1987-12-09 |
Family
ID=30932275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8097286U Pending JPS62193661U (fr) | 1986-05-30 | 1986-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62193661U (fr) |
-
1986
- 1986-05-30 JP JP8097286U patent/JPS62193661U/ja active Pending