JPS6436956U - - Google Patents
Info
- Publication number
- JPS6436956U JPS6436956U JP13200887U JP13200887U JPS6436956U JP S6436956 U JPS6436956 U JP S6436956U JP 13200887 U JP13200887 U JP 13200887U JP 13200887 U JP13200887 U JP 13200887U JP S6436956 U JPS6436956 U JP S6436956U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- discharge chamber
- source device
- rotatably supported
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200887U JPS6436956U (fr) | 1987-08-29 | 1987-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200887U JPS6436956U (fr) | 1987-08-29 | 1987-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436956U true JPS6436956U (fr) | 1989-03-06 |
Family
ID=31388586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13200887U Pending JPS6436956U (fr) | 1987-08-29 | 1987-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436956U (fr) |
-
1987
- 1987-08-29 JP JP13200887U patent/JPS6436956U/ja active Pending