JPH0257549U - - Google Patents
Info
- Publication number
- JPH0257549U JPH0257549U JP13729088U JP13729088U JPH0257549U JP H0257549 U JPH0257549 U JP H0257549U JP 13729088 U JP13729088 U JP 13729088U JP 13729088 U JP13729088 U JP 13729088U JP H0257549 U JPH0257549 U JP H0257549U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- source head
- extraction electrode
- electrode system
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 5
- 238000005468 ion implantation Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13729088U JPH0257549U (fr) | 1988-10-20 | 1988-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13729088U JPH0257549U (fr) | 1988-10-20 | 1988-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257549U true JPH0257549U (fr) | 1990-04-25 |
Family
ID=31398580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13729088U Pending JPH0257549U (fr) | 1988-10-20 | 1988-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257549U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (ja) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | イオンビーム装置 |
-
1988
- 1988-10-20 JP JP13729088U patent/JPH0257549U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (ja) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | イオンビーム装置 |