JPS6374910A - 高純度四弗化珪素の製造法 - Google Patents

高純度四弗化珪素の製造法

Info

Publication number
JPS6374910A
JPS6374910A JP21929186A JP21929186A JPS6374910A JP S6374910 A JPS6374910 A JP S6374910A JP 21929186 A JP21929186 A JP 21929186A JP 21929186 A JP21929186 A JP 21929186A JP S6374910 A JPS6374910 A JP S6374910A
Authority
JP
Japan
Prior art keywords
silicon tetrafluoride
metal
silifluoride
heat treatment
thermal decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21929186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329726B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Momotake
宏之 百武
Isao Harada
功 原田
Nobuhiko Koto
信彦 古藤
Yukihiro Yoda
與田　幸広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP21929186A priority Critical patent/JPS6374910A/ja
Publication of JPS6374910A publication Critical patent/JPS6374910A/ja
Publication of JPH0329726B2 publication Critical patent/JPH0329726B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP21929186A 1986-09-19 1986-09-19 高純度四弗化珪素の製造法 Granted JPS6374910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21929186A JPS6374910A (ja) 1986-09-19 1986-09-19 高純度四弗化珪素の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21929186A JPS6374910A (ja) 1986-09-19 1986-09-19 高純度四弗化珪素の製造法

Publications (2)

Publication Number Publication Date
JPS6374910A true JPS6374910A (ja) 1988-04-05
JPH0329726B2 JPH0329726B2 (enrdf_load_stackoverflow) 1991-04-25

Family

ID=16733198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21929186A Granted JPS6374910A (ja) 1986-09-19 1986-09-19 高純度四弗化珪素の製造法

Country Status (1)

Country Link
JP (1) JPS6374910A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770253B2 (en) 2001-09-11 2004-08-03 Central Glass Company, Limited Process for producing silicon tetrafluoride
CN104843713A (zh) * 2015-06-04 2015-08-19 贵州省产品质量监督检验院 一种高温分解氟硅酸钠制备四氟化硅的方法及其装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770253B2 (en) 2001-09-11 2004-08-03 Central Glass Company, Limited Process for producing silicon tetrafluoride
CN104843713A (zh) * 2015-06-04 2015-08-19 贵州省产品质量监督检验院 一种高温分解氟硅酸钠制备四氟化硅的方法及其装置

Also Published As

Publication number Publication date
JPH0329726B2 (enrdf_load_stackoverflow) 1991-04-25

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