JPS637389B2 - - Google Patents
Info
- Publication number
- JPS637389B2 JPS637389B2 JP211981A JP211981A JPS637389B2 JP S637389 B2 JPS637389 B2 JP S637389B2 JP 211981 A JP211981 A JP 211981A JP 211981 A JP211981 A JP 211981A JP S637389 B2 JPS637389 B2 JP S637389B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- etching
- metal
- pattern
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 239000002184 metal Substances 0.000 claims description 44
- 239000004020 conductor Substances 0.000 claims description 36
- 238000005530 etching Methods 0.000 claims description 33
- 239000010409 thin film Substances 0.000 claims description 32
- 229920002120 photoresistant polymer Polymers 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 6
- 238000009713 electroplating Methods 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 2
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000002223 garnet Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 15
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP211981A JPS57116384A (en) | 1981-01-12 | 1981-01-12 | Manufacture of magnetic bubble display element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP211981A JPS57116384A (en) | 1981-01-12 | 1981-01-12 | Manufacture of magnetic bubble display element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57116384A JPS57116384A (en) | 1982-07-20 |
| JPS637389B2 true JPS637389B2 (enrdf_load_stackoverflow) | 1988-02-16 |
Family
ID=11520457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP211981A Granted JPS57116384A (en) | 1981-01-12 | 1981-01-12 | Manufacture of magnetic bubble display element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57116384A (enrdf_load_stackoverflow) |
-
1981
- 1981-01-12 JP JP211981A patent/JPS57116384A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57116384A (en) | 1982-07-20 |
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