JPS6373360U - - Google Patents
Info
- Publication number
- JPS6373360U JPS6373360U JP16840186U JP16840186U JPS6373360U JP S6373360 U JPS6373360 U JP S6373360U JP 16840186 U JP16840186 U JP 16840186U JP 16840186 U JP16840186 U JP 16840186U JP S6373360 U JPS6373360 U JP S6373360U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- shutter
- source
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16840186U JPH0543090Y2 (enExample) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16840186U JPH0543090Y2 (enExample) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373360U true JPS6373360U (enExample) | 1988-05-16 |
| JPH0543090Y2 JPH0543090Y2 (enExample) | 1993-10-29 |
Family
ID=31101250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16840186U Expired - Lifetime JPH0543090Y2 (enExample) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543090Y2 (enExample) |
-
1986
- 1986-10-31 JP JP16840186U patent/JPH0543090Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543090Y2 (enExample) | 1993-10-29 |