JPS63115066U - - Google Patents
Info
- Publication number
- JPS63115066U JPS63115066U JP804287U JP804287U JPS63115066U JP S63115066 U JPS63115066 U JP S63115066U JP 804287 U JP804287 U JP 804287U JP 804287 U JP804287 U JP 804287U JP S63115066 U JPS63115066 U JP S63115066U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- forming
- generation source
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP804287U JPS63115066U (enExample) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP804287U JPS63115066U (enExample) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115066U true JPS63115066U (enExample) | 1988-07-25 |
Family
ID=30792059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP804287U Pending JPS63115066U (enExample) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115066U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025092790A (ja) * | 2022-05-26 | 2025-06-20 | 克弥 西沢 | 光子を用いた物質製造システム |
-
1987
- 1987-01-22 JP JP804287U patent/JPS63115066U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025092790A (ja) * | 2022-05-26 | 2025-06-20 | 克弥 西沢 | 光子を用いた物質製造システム |