JPS6373186U - - Google Patents
Info
- Publication number
- JPS6373186U JPS6373186U JP1986168919U JP16891986U JPS6373186U JP S6373186 U JPS6373186 U JP S6373186U JP 1986168919 U JP1986168919 U JP 1986168919U JP 16891986 U JP16891986 U JP 16891986U JP S6373186 U JPS6373186 U JP S6373186U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- polishing
- steam
- cleaning
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims 5
- 238000013020 steam cleaning Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は本発明の一実施例を示す正面図、第２
図は第１図における側面図である。
１：治具、２：ウエハ、３：ワツクス、４：有
機溶剤、５：タンク、６：加熱ヒータ、７：疑縮
コイル、８：洗浄槽、９：チヤツク、１０：昇降
部、１２：駆動モータ。
Fig. 1 is a front view showing one embodiment of the present invention, Fig. 2 is a front view showing one embodiment of the present invention;
The figure is a side view of FIG. 1. 1: jig, 2: wafer, 3: wax, 4: organic solvent, 5: tank, 6: heater, 7: pseudo-condensing coil, 8: cleaning tank, 9: chuck, 10: lifting section, 12: drive motor.
Claims (1)
洗浄装置において、有機溶剤を収納するタンクと
、該有機溶剤を加熱して蒸気を発生する加熱ヒー
タと、該蒸気を疑縮液化させて前記研磨治具に降
着させる蒸気洗浄槽と、前記研磨治具を支持する
回転可能な治具チヤツクと、該治具チヤツクを前
記蒸気洗浄槽に昇降させる昇降部とが設けられて
いることを特徴とする研磨治具洗浄装置。 A polishing jig cleaning device for cleaning semiconductor wafer polishing jigs includes a tank that stores an organic solvent, a heater that heats the organic solvent to generate steam, and a heater that converts the steam into a quasi-condensed liquid to perform the polishing. The method is characterized in that it is provided with a steam cleaning tank for depositing onto the jig, a rotatable jig chuck for supporting the polishing jig, and an elevating section for raising and lowering the jig chuck to and from the steam cleaning tank. Polishing jig cleaning equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168919U JPS6373186U (en) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168919U JPS6373186U (en) | 1986-10-31 | 1986-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373186U true JPS6373186U (en) | 1988-05-16 |
Family
ID=31102249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986168919U Pending JPS6373186U (en) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373186U (en) |
-
1986
- 1986-10-31 JP JP1986168919U patent/JPS6373186U/ja active Pending
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