JPS6370651U - - Google Patents

Info

Publication number
JPS6370651U
JPS6370651U JP16487486U JP16487486U JPS6370651U JP S6370651 U JPS6370651 U JP S6370651U JP 16487486 U JP16487486 U JP 16487486U JP 16487486 U JP16487486 U JP 16487486U JP S6370651 U JPS6370651 U JP S6370651U
Authority
JP
Japan
Prior art keywords
arc chamber
sealing material
current introduction
introduction terminal
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16487486U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16487486U priority Critical patent/JPS6370651U/ja
Publication of JPS6370651U publication Critical patent/JPS6370651U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例を示すイオン源の
要部拡大図である。第2図は従来のイオン源の要
部拡大図である。 1:アークチヤンバ、2:フイラメント、7:
フランジ付電流導入端子、71:導体、75:フ
ランジ、8:シール材、9:冷媒路。

Claims (1)

    【実用新案登録請求の範囲】
  1. アークチヤンバ内に配設されたフイラメントか
    らの熱電子をもつてプラズマを発生させるものに
    おいて、前記フイラメントがつながれる導体をフ
    ランジに取り付けてフランジ付電流導入端子を形
    成し、このフランジ付電流導入端子を前記アーク
    チヤンバに真空シール材を用いて取り外し可能に
    気密に固着するとともに、前記シール材の近傍に
    冷媒を循環せしめる冷媒路を設けてなることを特
    徴とするイオン源。
JP16487486U 1986-10-27 1986-10-27 Pending JPS6370651U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16487486U JPS6370651U (ja) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16487486U JPS6370651U (ja) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6370651U true JPS6370651U (ja) 1988-05-12

Family

ID=31094396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16487486U Pending JPS6370651U (ja) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6370651U (ja)

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