JPS6369548U - - Google Patents

Info

Publication number
JPS6369548U
JPS6369548U JP16482386U JP16482386U JPS6369548U JP S6369548 U JPS6369548 U JP S6369548U JP 16482386 U JP16482386 U JP 16482386U JP 16482386 U JP16482386 U JP 16482386U JP S6369548 U JPS6369548 U JP S6369548U
Authority
JP
Japan
Prior art keywords
container
gas
inlet
metal mesh
trap cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16482386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16482386U priority Critical patent/JPS6369548U/ja
Publication of JPS6369548U publication Critical patent/JPS6369548U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP16482386U 1986-10-27 1986-10-27 Pending JPS6369548U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16482386U JPS6369548U (en:Method) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16482386U JPS6369548U (en:Method) 1986-10-27 1986-10-27

Publications (1)

Publication Number Publication Date
JPS6369548U true JPS6369548U (en:Method) 1988-05-10

Family

ID=31094299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16482386U Pending JPS6369548U (en:Method) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPS6369548U (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002537644A (ja) * 1999-02-18 2002-11-05 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置
JP2010533066A (ja) * 2007-07-10 2010-10-21 イノヴァライト インコーポレイテッド 流通式プラズマ反応器においてｉｖ族ナノ粒子を生成するための方法及び装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002537644A (ja) * 1999-02-18 2002-11-05 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置
JP4828024B2 (ja) * 1999-02-18 2011-11-30 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプライン中の重合ｔｅｏｓ堆積抑制のための方法及びｔｅｏｓトラップ
JP2010533066A (ja) * 2007-07-10 2010-10-21 イノヴァライト インコーポレイテッド 流通式プラズマ反応器においてｉｖ族ナノ粒子を生成するための方法及び装置

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