JPS636846A - ＡｌＧａＡｓ系基板のエツチング方法 - Google Patents

ＡｌＧａＡｓ系基板のエツチング方法

Info

Publication number
JPS636846A
JPS636846A JP15041486A JP15041486A JPS636846A JP S636846 A JPS636846 A JP S636846A JP 15041486 A JP15041486 A JP 15041486A JP 15041486 A JP15041486 A JP 15041486A JP S636846 A JPS636846 A JP S636846A
Authority
JP
Japan
Prior art keywords
etching
etchant
layer
gaas
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15041486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545058B2 (enExample
Inventor
Akihiro Shima
島　顕洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15041486A priority Critical patent/JPS636846A/ja
Publication of JPS636846A publication Critical patent/JPS636846A/ja
Publication of JPH0545058B2 publication Critical patent/JPH0545058B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP15041486A 1986-06-26 1986-06-26 ＡｌＧａＡｓ系基板のエツチング方法 Granted JPS636846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15041486A JPS636846A (ja) 1986-06-26 1986-06-26 ＡｌＧａＡｓ系基板のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15041486A JPS636846A (ja) 1986-06-26 1986-06-26 ＡｌＧａＡｓ系基板のエツチング方法

Publications (2)

Publication Number Publication Date
JPS636846A true JPS636846A (ja) 1988-01-12
JPH0545058B2 JPH0545058B2 (enExample) 1993-07-08

Family

ID=15496419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15041486A Granted JPS636846A (ja) 1986-06-26 1986-06-26 ＡｌＧａＡｓ系基板のエツチング方法

Country Status (1)

Country Link
JP (1) JPS636846A (enExample)

Also Published As

Publication number Publication date
JPH0545058B2 (enExample) 1993-07-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term