JPS6367741B2 - - Google Patents

Info

Publication number
JPS6367741B2
JPS6367741B2 JP56051352A JP5135281A JPS6367741B2 JP S6367741 B2 JPS6367741 B2 JP S6367741B2 JP 56051352 A JP56051352 A JP 56051352A JP 5135281 A JP5135281 A JP 5135281A JP S6367741 B2 JPS6367741 B2 JP S6367741B2
Authority
JP
Japan
Prior art keywords
value
emitter
accelerating voltage
current
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56051352A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57165944A (en
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56051352A priority Critical patent/JPS57165944A/ja
Publication of JPS57165944A publication Critical patent/JPS57165944A/ja
Publication of JPS6367741B2 publication Critical patent/JPS6367741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56051352A 1981-04-06 1981-04-06 Dallying method for emitter Granted JPS57165944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56051352A JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56051352A JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Publications (2)

Publication Number Publication Date
JPS57165944A JPS57165944A (en) 1982-10-13
JPS6367741B2 true JPS6367741B2 (enExample) 1988-12-27

Family

ID=12884529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56051352A Granted JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Country Status (1)

Country Link
JP (1) JPS57165944A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023067681A1 (ja) * 2021-10-19 2023-04-27 株式会社日立ハイテク 荷電粒子線装置

Also Published As

Publication number Publication date
JPS57165944A (en) 1982-10-13

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