JPS57165944A - Dallying method for emitter - Google Patents

Dallying method for emitter

Info

Publication number
JPS57165944A
JPS57165944A JP5135281A JP5135281A JPS57165944A JP S57165944 A JPS57165944 A JP S57165944A JP 5135281 A JP5135281 A JP 5135281A JP 5135281 A JP5135281 A JP 5135281A JP S57165944 A JPS57165944 A JP S57165944A
Authority
JP
Japan
Prior art keywords
heating
heating current
dallying
current
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5135281A
Other languages
English (en)
Other versions
JPS6367741B2 (ja
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP5135281A priority Critical patent/JPS57165944A/ja
Publication of JPS57165944A publication Critical patent/JPS57165944A/ja
Publication of JPS6367741B2 publication Critical patent/JPS6367741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5135281A 1981-04-06 1981-04-06 Dallying method for emitter Granted JPS57165944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5135281A JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5135281A JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Publications (2)

Publication Number Publication Date
JPS57165944A true JPS57165944A (en) 1982-10-13
JPS6367741B2 JPS6367741B2 (ja) 1988-12-27

Family

ID=12884529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5135281A Granted JPS57165944A (en) 1981-04-06 1981-04-06 Dallying method for emitter

Country Status (1)

Country Link
JP (1) JPS57165944A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023067681A1 (ja) * 2021-10-19 2023-04-27 株式会社日立ハイテク 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023067681A1 (ja) * 2021-10-19 2023-04-27 株式会社日立ハイテク 荷電粒子線装置

Also Published As

Publication number Publication date
JPS6367741B2 (ja) 1988-12-27

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