JPS6366034B2 - - Google Patents
Info
- Publication number
- JPS6366034B2 JPS6366034B2 JP1309985A JP1309985A JPS6366034B2 JP S6366034 B2 JPS6366034 B2 JP S6366034B2 JP 1309985 A JP1309985 A JP 1309985A JP 1309985 A JP1309985 A JP 1309985A JP S6366034 B2 JPS6366034 B2 JP S6366034B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- colored
- metal
- thin film
- metal heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000004040 coloring Methods 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 208000003464 asthenopia Diseases 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
- Surface Heating Bodies (AREA)
- Joining Of Glass To Other Materials (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、反射率低減ひいては目に対する疲労
感を減少させるために着色すると共に曇り止め用
のヒータを設けたミラー、特には例えば自動車の
アウターミラーに好適する着色ミラーの製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to mirrors that are colored to reduce reflectance and thereby reduce eye fatigue and are equipped with anti-fogging heaters, particularly for use with outer surfaces of automobiles, for example. The present invention relates to a method for manufacturing a colored mirror suitable for mirrors.
［従来技術］
従来より、この種の着色ミラーの一例として、
ミラーを構成する透明ガラスとして着色ガラスを
使用すると共に、この着色ガラス背面の反射膜に
ヒータ膜を貼り付ける構成のものが供されてい
る。しかしながら斯かる従来構成のものでは、着
色ガラスを必要とし、しかもヒータ膜を別途に必
要として構造が複雑化するため、その分コスト高
になるばかりか、ヒータ膜を貼り付ける工程が必
要となる分だけ製造性が悪化するという問題点が
ある。[Prior Art] Conventionally, as an example of this type of colored mirror,
There is a configuration in which a colored glass is used as the transparent glass constituting the mirror, and a heater film is attached to a reflective film on the back surface of the colored glass. However, such a conventional structure requires colored glass and a separate heater film, which complicates the structure, which not only increases costs, but also requires a process for pasting the heater film. However, there is a problem in that manufacturability deteriorates.
［発明の目的］
本発明は上記事情に鑑みてなされたものであ
り、その目的は、構造を簡単化できると共に製造
性の向上をも図り得てコスト安にでき、同時に着
色の安定性を高めることもできる等の効果を奏す
る着色ミラーの製造方法を提供するにある。[Object of the Invention] The present invention has been made in view of the above circumstances, and its purpose is to simplify the structure, improve manufacturability, reduce costs, and at the same time improve the stability of coloring. It is an object of the present invention to provide a method for manufacturing a colored mirror that has the following effects.
［発明の要約］
本発明は上記目的を達成するために、透明基板
上に金属を酸素と反応させながら真空蒸着するこ
とにより金属酸化物製の着色薄膜を形成する工程
を行なつた後に、前記着色薄膜上に金属のみを真
空蒸着することにより反射膜兼用の金属ヒータ膜
を形成する工程を行なうようにしたものであり、
これによつて着色薄膜及び反射膜兼用の金属ヒー
タ膜を１種類の金属材料にて形成可能にしたもの
である。[Summary of the Invention] In order to achieve the above-mentioned object, the present invention includes a step of forming a colored thin film made of a metal oxide on a transparent substrate by vacuum evaporating the metal while reacting with oxygen. A process is performed to form a metal heater film that also serves as a reflective film by vacuum-depositing only a metal on a colored thin film.
This makes it possible to form a metal heater film that serves both as a colored thin film and a reflective film using one type of metal material.
［実施例］
以下、本発明の一実施例について図面を参照し
ながら説明する。[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.
着色ミラーの断面を示す第１図において、１は
ガラス製の透明基板、２はこの透明基板１上に添
設された膜厚10〜100Å程度の着色薄膜で、これ
は後述のように金属酸化物にて形成される。３は
この着色薄膜２上に添設された膜厚数百〜数千Å
程度の反射膜兼用の金属ヒータ膜であり、この金
属ヒータ膜３に電源４から通電して発熱させるこ
とによつて透明基板１の表面１ａでの曇り止めを
図ることができる。尚、５，５は金属ヒータ膜３
と電源４との間を繋ぐターミナルである。 In FIG. 1 showing a cross section of a colored mirror, 1 is a transparent substrate made of glass, 2 is a colored thin film with a thickness of about 10 to 100 Å attached to this transparent substrate 1, and this is made of metal oxide as described later. formed of things. 3 is a film added on this colored thin film 2 with a thickness of several hundred to several thousand Å.
The metal heater film 3 is a metal heater film that also serves as a reflective film, and by supplying electricity to the metal heater film 3 from a power source 4 to generate heat, it is possible to prevent the surface 1a of the transparent substrate 1 from fogging. In addition, 5, 5 is the metal heater film 3
This is a terminal that connects between the power source 4 and the power source 4.
第２図には上記着色ミラーの製造装置の一例が
概略的に示されている。即ち、６は周知構成の真
空蒸着装置で、この真空蒸着装置６は、ベルジヤ
等より成る蒸着室７内を真空ポンプ８によつて減
圧し、この状態で試料台９に取付けられた試料
（この場合、前記透明基板１）を加熱すると共に、
目的とする蒸着物質（この場合前記着色薄膜２及
び金属ヒータ膜３の材料となる金属）を例えばイ
オンプレーテイング法によりその透明基板１に蒸
着させることにより、着色薄膜２及び金属ヒータ
膜３を順次形成する。具体的には、まず蒸着物質
例えば鉄を酸素ガスと共に導入しながら10-3〜
10-4Torr程度の真空度にて反応性イオンプレー
テイング工程を行なうことにより金属酸化物たる
酸化鉄より成る着色膜２を形成する。このように
鉄を材料として着色薄膜２を形成した場合、その
着色薄膜２は緑色〜青色を呈するものであり、そ
の膜厚を調節することによつて色合いを変えるこ
とができる。そして、この後に鉄のみを導入して
イオンプレーテイング工程を行なうことによつて
反射膜兼用で且つ抵抗性発熱体として作用する金
属ヒータ膜３を形成するものである。 FIG. 2 schematically shows an example of a manufacturing apparatus for the above-mentioned colored mirror. That is, 6 is a vacuum evaporation apparatus of a well-known configuration, and this vacuum evaporation apparatus 6 reduces the pressure in the evaporation chamber 7 consisting of a bell gear or the like using a vacuum pump 8, and in this state, the sample mounted on the sample stage 9 (this In this case, while heating the transparent substrate 1),
The colored thin film 2 and the metal heater film 3 are sequentially deposited on the transparent substrate 1 by, for example, ion plating a target vapor deposition substance (in this case, the metal that is the material of the colored thin film 2 and the metal heater film 3). Form. Specifically, first, a vapor deposition material such as iron is introduced together with oxygen gas while 10 -3 ~
A colored film 2 made of iron oxide, which is a metal oxide, is formed by performing a reactive ion plating process at a vacuum level of about 10 -4 Torr. When the colored thin film 2 is formed using iron as a material in this way, the colored thin film 2 exhibits a green to blue color, and the hue can be changed by adjusting the film thickness. Thereafter, only iron is introduced and an ion plating process is performed to form a metal heater film 3 which also serves as a reflective film and acts as a resistive heating element.
上記した本実施例によれば、従来のように着色
ガラスを必要とせず、しかも着色膜２及び金属ヒ
ータ膜３を一体に設けることができてその構造を
簡単化できるものである。また、着色膜２及び金
属ヒータ膜３を１種類の材料にて同時に形成する
ことができ、しかもこれら着色膜２及び金属ヒー
タ膜３を形成する各工程を同一の真空蒸着装置６
を用いて連続的に行ない得て製造性を向上させる
ことができ、総じてコスト安になし得るものであ
る。さらに、着色膜２は金属酸化物により着色さ
れているから退色の虞がなく、その着色の安定性
が高まるようになる。 According to the above-mentioned embodiment, there is no need for colored glass as in the conventional case, and the colored film 2 and metal heater film 3 can be provided integrally, thereby simplifying the structure. Further, the colored film 2 and the metal heater film 3 can be formed simultaneously using one type of material, and each step of forming the colored film 2 and the metal heater film 3 can be performed using the same vacuum evaporation apparatus.
It can be carried out continuously using the same method, improving productivity, and can be done at a low cost overall. Furthermore, since the colored film 2 is colored with a metal oxide, there is no risk of fading, and the stability of the coloring is increased.
尚、上記実施例では、着色膜２及び金属ヒータ
膜３をイオンプレーテイング法により形成するよ
うにしたが、これに代えてスパツタリング法或は
通常の真空蒸着法を採用しても良い。また、蒸着
物質としては、鉄に限らず例えば13Crステンレ
ス、18Cr―8Niステンレス或はチタン等を採用し
ても良く、13Crステンレスを採用した場合には
青色〜灰色の着色が得られ、18Cr―8Niステンレ
ス、チタンを採用した各場合には夫々黄金色、青
色の着色が得られる。 In the above embodiment, the colored film 2 and the metal heater film 3 were formed by the ion plating method, but instead of this, a sputtering method or a normal vacuum evaporation method may be used. In addition, the vapor deposition material is not limited to iron, but may also be 13Cr stainless steel, 18Cr-8Ni stainless steel, titanium, etc. When 13Cr stainless steel is used, blue to gray coloring can be obtained, and 18Cr-8Ni When stainless steel and titanium are used, golden yellow and blue colors are obtained, respectively.
［発明の効果］
本発明によれば以上の説明によつて明らかなよ
うに、曇り止め用の金属ヒータ膜を備えた着色ミ
ラーを製造する場合に、その着色ミラーの構造の
簡単化を図り得ると共に製造性の向上を図り得て
コスト安にでき、しかも着色の安定性を向上させ
ることもできるという優れた効果を奏するもので
ある。[Effects of the Invention] As is clear from the above description, according to the present invention, when manufacturing a colored mirror equipped with a metal heater film for preventing fogging, the structure of the colored mirror can be simplified. At the same time, it has the excellent effect of improving manufacturability, reducing costs, and improving the stability of coloring.
図面は本発明の一実施例を示すもので、第１図
は縦断面図、第２図は製造装置の概略的構成図で
ある。
図中、１は透明基板、２は着色膜、３は金属ヒ
ータ膜、６は真空蒸着装置を示す。
The drawings show one embodiment of the present invention, and FIG. 1 is a longitudinal sectional view, and FIG. 2 is a schematic configuration diagram of a manufacturing apparatus. In the figure, 1 is a transparent substrate, 2 is a colored film, 3 is a metal heater film, and 6 is a vacuum evaporation device.
Claims (1)
空蒸着することにより金属酸化物製の着色薄膜を
形成する工程と、この後に前記着色薄膜上に金属
のみを真空蒸着することにより反射膜兼用の金属
ヒータ膜を形成する工程を経て成る着色ミラーの
製造方法。1. A step of forming a colored thin film made of a metal oxide by vacuum evaporating a metal while reacting with oxygen on a transparent substrate, and then forming a metal that also serves as a reflective film by vacuum evaporating only the metal on the colored thin film. A method for manufacturing a colored mirror, which includes a step of forming a heater film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309985A JPS61173485A (en) | 1985-01-25 | 1985-01-25 | Manufacture of colored mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1309985A JPS61173485A (en) | 1985-01-25 | 1985-01-25 | Manufacture of colored mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61173485A JPS61173485A (en) | 1986-08-05 |
| JPS6366034B2 true JPS6366034B2 (en) | 1988-12-19 |
Family
ID=11823704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1309985A Granted JPS61173485A (en) | 1985-01-25 | 1985-01-25 | Manufacture of colored mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173485A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995012508A1 (en) * | 1993-11-04 | 1995-05-11 | Pentel Kabushiki Kaisha | Mirror with heater |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3332320B2 (en) * | 1996-09-12 | 2002-10-07 | 株式会社東海理化電機製作所 | Car outer mirror |
-
1985
- 1985-01-25 JP JP1309985A patent/JPS61173485A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995012508A1 (en) * | 1993-11-04 | 1995-05-11 | Pentel Kabushiki Kaisha | Mirror with heater |
| US5990449A (en) * | 1993-11-04 | 1999-11-23 | Pentel Kabushiki Kaisha | Electric heating device for mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61173485A (en) | 1986-08-05 |
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