JPS6365231U - - Google Patents

Info

Publication number
JPS6365231U
JPS6365231U JP15964086U JP15964086U JPS6365231U JP S6365231 U JPS6365231 U JP S6365231U JP 15964086 U JP15964086 U JP 15964086U JP 15964086 U JP15964086 U JP 15964086U JP S6365231 U JPS6365231 U JP S6365231U
Authority
JP
Japan
Prior art keywords
wafer
transfer device
wafer prober
belt
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15964086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15964086U priority Critical patent/JPS6365231U/ja
Publication of JPS6365231U publication Critical patent/JPS6365231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15964086U 1986-10-17 1986-10-17 Pending JPS6365231U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15964086U JPS6365231U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15964086U JPS6365231U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365231U true JPS6365231U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31084262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15964086U Pending JPS6365231U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365231U (enrdf_load_stackoverflow)

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