JPH03120560U - - Google Patents
Info
- Publication number
- JPH03120560U JPH03120560U JP2670690U JP2670690U JPH03120560U JP H03120560 U JPH03120560 U JP H03120560U JP 2670690 U JP2670690 U JP 2670690U JP 2670690 U JP2670690 U JP 2670690U JP H03120560 U JPH03120560 U JP H03120560U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- sensor
- heater block
- output
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000009529 body temperature measurement Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670690U JPH03120560U (enrdf_load_stackoverflow) | 1990-03-15 | 1990-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670690U JPH03120560U (enrdf_load_stackoverflow) | 1990-03-15 | 1990-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120560U true JPH03120560U (enrdf_load_stackoverflow) | 1991-12-11 |
Family
ID=31529587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2670690U Pending JPH03120560U (enrdf_load_stackoverflow) | 1990-03-15 | 1990-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120560U (enrdf_load_stackoverflow) |
-
1990
- 1990-03-15 JP JP2670690U patent/JPH03120560U/ja active Pending
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