JPS62112148U - - Google Patents

Info

Publication number
JPS62112148U
JPS62112148U JP55886U JP55886U JPS62112148U JP S62112148 U JPS62112148 U JP S62112148U JP 55886 U JP55886 U JP 55886U JP 55886 U JP55886 U JP 55886U JP S62112148 U JPS62112148 U JP S62112148U
Authority
JP
Japan
Prior art keywords
prober
semiconductor substrate
section
carrier
stage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP55886U priority Critical patent/JPS62112148U/ja
Publication of JPS62112148U publication Critical patent/JPS62112148U/ja
Pending legal-status Critical Current

Links

JP55886U 1986-01-07 1986-01-07 Pending JPS62112148U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55886U JPS62112148U (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55886U JPS62112148U (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Publications (1)

Publication Number Publication Date
JPS62112148U true JPS62112148U (enrdf_load_stackoverflow) 1987-07-17

Family

ID=30777634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55886U Pending JPS62112148U (enrdf_load_stackoverflow) 1986-01-07 1986-01-07

Country Status (1)

Country Link
JP (1) JPS62112148U (enrdf_load_stackoverflow)

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