JPS6363744U - - Google Patents
Info
- Publication number
- JPS6363744U JPS6363744U JP15910286U JP15910286U JPS6363744U JP S6363744 U JPS6363744 U JP S6363744U JP 15910286 U JP15910286 U JP 15910286U JP 15910286 U JP15910286 U JP 15910286U JP S6363744 U JPS6363744 U JP S6363744U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- mounting table
- optical system
- surface direction
- testing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910286U JPS6363744U (OSRAM) | 1986-10-16 | 1986-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15910286U JPS6363744U (OSRAM) | 1986-10-16 | 1986-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6363744U true JPS6363744U (OSRAM) | 1988-04-27 |
Family
ID=31083218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15910286U Pending JPS6363744U (OSRAM) | 1986-10-16 | 1986-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6363744U (OSRAM) |
-
1986
- 1986-10-16 JP JP15910286U patent/JPS6363744U/ja active Pending
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