JPS6363744U - - Google Patents

Info

Publication number
JPS6363744U
JPS6363744U JP15910286U JP15910286U JPS6363744U JP S6363744 U JPS6363744 U JP S6363744U JP 15910286 U JP15910286 U JP 15910286U JP 15910286 U JP15910286 U JP 15910286U JP S6363744 U JPS6363744 U JP S6363744U
Authority
JP
Japan
Prior art keywords
temperature
mounting table
optical system
surface direction
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15910286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15910286U priority Critical patent/JPS6363744U/ja
Publication of JPS6363744U publication Critical patent/JPS6363744U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Temperature (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
JP15910286U 1986-10-16 1986-10-16 Pending JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15910286U JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-16 1986-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15910286U JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-16 1986-10-16

Publications (1)

Publication Number Publication Date
JPS6363744U true JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-27

Family

ID=31083218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15910286U Pending JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-16 1986-10-16

Country Status (1)

Country Link
JP (1) JPS6363744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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