JPS6363111B2 - - Google Patents

Info

Publication number
JPS6363111B2
JPS6363111B2 JP56171387A JP17138781A JPS6363111B2 JP S6363111 B2 JPS6363111 B2 JP S6363111B2 JP 56171387 A JP56171387 A JP 56171387A JP 17138781 A JP17138781 A JP 17138781A JP S6363111 B2 JPS6363111 B2 JP S6363111B2
Authority
JP
Japan
Prior art keywords
magnification
image
display
sample
displayed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56171387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5873949A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56171387A priority Critical patent/JPS5873949A/ja
Publication of JPS5873949A publication Critical patent/JPS5873949A/ja
Publication of JPS6363111B2 publication Critical patent/JPS6363111B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56171387A 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置 Granted JPS5873949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56171387A JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56171387A JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Publications (2)

Publication Number Publication Date
JPS5873949A JPS5873949A (ja) 1983-05-04
JPS6363111B2 true JPS6363111B2 (enrdf_load_stackoverflow) 1988-12-06

Family

ID=15922215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56171387A Granted JPS5873949A (ja) 1981-10-28 1981-10-28 走査電子顕微鏡の倍率表示装置

Country Status (1)

Country Link
JP (1) JPS5873949A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5690086B2 (ja) * 2010-07-02 2015-03-25 株式会社キーエンス 拡大観察装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55130055A (en) * 1979-03-30 1980-10-08 Jeol Ltd Scanning electron microscope
JPS5635362A (en) * 1979-08-31 1981-04-08 Jeol Ltd Scanning electron microscope

Also Published As

Publication number Publication date
JPS5873949A (ja) 1983-05-04

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