JPS6240814B2 - - Google Patents

Info

Publication number
JPS6240814B2
JPS6240814B2 JP55139842A JP13984280A JPS6240814B2 JP S6240814 B2 JPS6240814 B2 JP S6240814B2 JP 55139842 A JP55139842 A JP 55139842A JP 13984280 A JP13984280 A JP 13984280A JP S6240814 B2 JPS6240814 B2 JP S6240814B2
Authority
JP
Japan
Prior art keywords
lens
electron
sample
generation circuit
signal generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55139842A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5765656A (en
Inventor
Hiroyoshi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55139842A priority Critical patent/JPS5765656A/ja
Publication of JPS5765656A publication Critical patent/JPS5765656A/ja
Publication of JPS6240814B2 publication Critical patent/JPS6240814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55139842A 1980-10-08 1980-10-08 Limited view diffraction image device Granted JPS5765656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55139842A JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55139842A JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Publications (2)

Publication Number Publication Date
JPS5765656A JPS5765656A (en) 1982-04-21
JPS6240814B2 true JPS6240814B2 (enrdf_load_stackoverflow) 1987-08-31

Family

ID=15254777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55139842A Granted JPS5765656A (en) 1980-10-08 1980-10-08 Limited view diffraction image device

Country Status (1)

Country Link
JP (1) JPS5765656A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182516U (enrdf_load_stackoverflow) * 1987-05-19 1988-11-24

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050850A (ja) * 1983-08-31 1985-03-20 Jeol Ltd 走査電子顕微鏡
JP2008112748A (ja) * 2008-02-04 2008-05-15 Hitachi Ltd 走査形荷電粒子顕微鏡、並びに走査形荷電粒子顕微鏡の非点収差補正方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945173A (ja) * 1982-09-08 1984-03-13 Victor Co Of Japan Ltd 熱転写型カラ−プリンタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182516U (enrdf_load_stackoverflow) * 1987-05-19 1988-11-24

Also Published As

Publication number Publication date
JPS5765656A (en) 1982-04-21

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