JPS6361167U - - Google Patents
Info
- Publication number
- JPS6361167U JPS6361167U JP1986155011U JP15501186U JPS6361167U JP S6361167 U JPS6361167 U JP S6361167U JP 1986155011 U JP1986155011 U JP 1986155011U JP 15501186 U JP15501186 U JP 15501186U JP S6361167 U JPS6361167 U JP S6361167U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor thin
- electrode
- series
- sensing element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000005355 Hall effect Effects 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Hall/Mr Elements (AREA)
Description
第１図は本考案の基本構造、第２図及び第３図
は第１の実施例、第４図及び第５図は第２の実施
例を夫々示し、第２図、第４図は平面図、第１図
は第２図及び第４図における―断面図、第３
図は第２図における―断面図、第５図は第４
図における―断面図である。第６図は従来例
を示す斜視図である。
１０……基板、１１，１２……第１、第２半導
体薄膜、１３……絶縁性薄膜、１４〜１８……電
極。
FIG. 1 shows the basic structure of the present invention, FIGS. 2 and 3 show the first embodiment, FIGS. 4 and 5 show the second embodiment, and FIGS. 2 and 4 are plan views. Figure 1 is a sectional view of Figures 2 and 4;
The figure is a sectional view of Figure 2, and Figure 5 is a cross-sectional view of Figure 4.
It is a sectional view in the figure. FIG. 6 is a perspective view showing a conventional example. 10... Substrate, 11, 12... First and second semiconductor thin films, 13... Insulating thin film, 14-18... Electrodes.
Claims (1)
薄膜とを交互に積層すると共に、上記半導体薄膜
の各々に発生するホール電圧を互いに直列的に相
加する電極を設けたことを特徴とする磁気検知素
子。 A magnetic sensing element characterized in that a semiconductor thin film exhibiting a Hall effect and an electrically insulating thin film are alternately laminated, and an electrode is provided for adding the Hall voltage generated in each of the semiconductor thin films in series to each other. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986155011U JPS6361167U (en) | 1986-10-09 | 1986-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986155011U JPS6361167U (en) | 1986-10-09 | 1986-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6361167U true JPS6361167U (en) | 1988-04-22 |
Family
ID=31075325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986155011U Pending JPS6361167U (en) | 1986-10-09 | 1986-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6361167U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02143576A (en) * | 1988-11-25 | 1990-06-01 | Murata Mfg Co Ltd | Magnetic detection |
-
1986
- 1986-10-09 JP JP1986155011U patent/JPS6361167U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02143576A (en) * | 1988-11-25 | 1990-06-01 | Murata Mfg Co Ltd | Magnetic detection |