JPS6360526B2 - - Google Patents
Info
- Publication number
- JPS6360526B2 JPS6360526B2 JP53135449A JP13544978A JPS6360526B2 JP S6360526 B2 JPS6360526 B2 JP S6360526B2 JP 53135449 A JP53135449 A JP 53135449A JP 13544978 A JP13544978 A JP 13544978A JP S6360526 B2 JPS6360526 B2 JP S6360526B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- resist
- film
- photoresist
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13544978A JPS5562738A (en) | 1978-11-02 | 1978-11-02 | Preparation of semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13544978A JPS5562738A (en) | 1978-11-02 | 1978-11-02 | Preparation of semiconductor element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5562738A JPS5562738A (en) | 1980-05-12 |
| JPS6360526B2 true JPS6360526B2 (enrdf_load_stackoverflow) | 1988-11-24 |
Family
ID=15151964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13544978A Granted JPS5562738A (en) | 1978-11-02 | 1978-11-02 | Preparation of semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5562738A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57145325A (en) * | 1981-03-04 | 1982-09-08 | Nec Corp | Manufacture of semiconductor device |
| JPS63244032A (ja) * | 1987-03-31 | 1988-10-11 | Tanaka Kikinzoku Kogyo Kk | 凹凸を有する基板へのレジスト膜の形成方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS529354B2 (enrdf_load_stackoverflow) * | 1972-05-01 | 1977-03-15 | ||
| JPS5128466A (en) * | 1974-09-03 | 1976-03-10 | Matsushita Electric Ind Co Ltd | Kyoshijoha bunshukairo |
-
1978
- 1978-11-02 JP JP13544978A patent/JPS5562738A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5562738A (en) | 1980-05-12 |
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