JPS6360300U - - Google Patents

Info

Publication number
JPS6360300U
JPS6360300U JP15424186U JP15424186U JPS6360300U JP S6360300 U JPS6360300 U JP S6360300U JP 15424186 U JP15424186 U JP 15424186U JP 15424186 U JP15424186 U JP 15424186U JP S6360300 U JPS6360300 U JP S6360300U
Authority
JP
Japan
Prior art keywords
nozzle hole
plasma
hollow cathode
front disk
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15424186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0638399Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15424186U priority Critical patent/JPH0638399Y2/ja
Publication of JPS6360300U publication Critical patent/JPS6360300U/ja
Application granted granted Critical
Publication of JPH0638399Y2 publication Critical patent/JPH0638399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP15424186U 1986-10-07 1986-10-07 プラズマ発生装置 Expired - Lifetime JPH0638399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15424186U JPH0638399Y2 (ja) 1986-10-07 1986-10-07 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15424186U JPH0638399Y2 (ja) 1986-10-07 1986-10-07 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPS6360300U true JPS6360300U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-21
JPH0638399Y2 JPH0638399Y2 (ja) 1994-10-05

Family

ID=31073861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15424186U Expired - Lifetime JPH0638399Y2 (ja) 1986-10-07 1986-10-07 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0638399Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0196372A (ja) * 1987-10-07 1989-04-14 Raimuzu:Kk イオンプレーティング装置
WO2018135153A1 (ja) * 2017-01-17 2018-07-26 イオンラボ株式会社 金属イオン源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0196372A (ja) * 1987-10-07 1989-04-14 Raimuzu:Kk イオンプレーティング装置
WO2018135153A1 (ja) * 2017-01-17 2018-07-26 イオンラボ株式会社 金属イオン源

Also Published As

Publication number Publication date
JPH0638399Y2 (ja) 1994-10-05

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