JPS6359249B2 - - Google Patents

Info

Publication number
JPS6359249B2
JPS6359249B2 JP54096107A JP9610779A JPS6359249B2 JP S6359249 B2 JPS6359249 B2 JP S6359249B2 JP 54096107 A JP54096107 A JP 54096107A JP 9610779 A JP9610779 A JP 9610779A JP S6359249 B2 JPS6359249 B2 JP S6359249B2
Authority
JP
Japan
Prior art keywords
cassette
wafer
wafers
transfer
cassettes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54096107A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5621340A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9610779A priority Critical patent/JPS5621340A/ja
Publication of JPS5621340A publication Critical patent/JPS5621340A/ja
Publication of JPS6359249B2 publication Critical patent/JPS6359249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
JP9610779A 1979-07-30 1979-07-30 Device for automatic treament of wafer Granted JPS5621340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9610779A JPS5621340A (en) 1979-07-30 1979-07-30 Device for automatic treament of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9610779A JPS5621340A (en) 1979-07-30 1979-07-30 Device for automatic treament of wafer

Publications (2)

Publication Number Publication Date
JPS5621340A JPS5621340A (en) 1981-02-27
JPS6359249B2 true JPS6359249B2 (it) 1988-11-18

Family

ID=14156156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9610779A Granted JPS5621340A (en) 1979-07-30 1979-07-30 Device for automatic treament of wafer

Country Status (1)

Country Link
JP (1) JPS5621340A (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030057A (en) * 1987-11-06 1991-07-09 Tel Sagami Limited Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
JPH0384943A (ja) * 1989-08-28 1991-04-10 Tokyo Electron Ltd トレー保持機構

Also Published As

Publication number Publication date
JPS5621340A (en) 1981-02-27

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