JPS6356381A - レ−ザ加工用非接触倣い装置 - Google Patents

レ−ザ加工用非接触倣い装置

Info

Publication number
JPS6356381A
JPS6356381A JP61198485A JP19848586A JPS6356381A JP S6356381 A JPS6356381 A JP S6356381A JP 61198485 A JP61198485 A JP 61198485A JP 19848586 A JP19848586 A JP 19848586A JP S6356381 A JPS6356381 A JP S6356381A
Authority
JP
Japan
Prior art keywords
workpiece
processing
floating member
laser
copying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61198485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420718B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshihide Kanehara
好秀 金原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61198485A priority Critical patent/JPS6356381A/ja
Publication of JPS6356381A publication Critical patent/JPS6356381A/ja
Publication of JPH0420718B2 publication Critical patent/JPH0420718B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP61198485A 1986-08-25 1986-08-25 レ−ザ加工用非接触倣い装置 Granted JPS6356381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61198485A JPS6356381A (ja) 1986-08-25 1986-08-25 レ−ザ加工用非接触倣い装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61198485A JPS6356381A (ja) 1986-08-25 1986-08-25 レ−ザ加工用非接触倣い装置

Publications (2)

Publication Number Publication Date
JPS6356381A true JPS6356381A (ja) 1988-03-10
JPH0420718B2 JPH0420718B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06

Family

ID=16391898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61198485A Granted JPS6356381A (ja) 1986-08-25 1986-08-25 レ−ザ加工用非接触倣い装置

Country Status (1)

Country Link
JP (1) JPS6356381A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080237206A1 (en) * 2003-04-03 2008-10-02 Exitech Limited Method for laser micromachining

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080237206A1 (en) * 2003-04-03 2008-10-02 Exitech Limited Method for laser micromachining
US8263901B2 (en) * 2003-04-03 2012-09-11 Oerlikon Solar Ag, Truebbach Method for laser micromachining

Also Published As

Publication number Publication date
JPH0420718B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees