JPS635626U - - Google Patents
Info
- Publication number
- JPS635626U JPS635626U JP9866586U JP9866586U JPS635626U JP S635626 U JPS635626 U JP S635626U JP 9866586 U JP9866586 U JP 9866586U JP 9866586 U JP9866586 U JP 9866586U JP S635626 U JPS635626 U JP S635626U
- Authority
- JP
- Japan
- Prior art keywords
- screw
- reaction tube
- metal member
- gas
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9866586U JPS635626U (lm) | 1986-06-26 | 1986-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9866586U JPS635626U (lm) | 1986-06-26 | 1986-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635626U true JPS635626U (lm) | 1988-01-14 |
Family
ID=30966817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9866586U Pending JPS635626U (lm) | 1986-06-26 | 1986-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635626U (lm) |
-
1986
- 1986-06-26 JP JP9866586U patent/JPS635626U/ja active Pending
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